The major areas of activity in the development of MEMS and NEMS solicited and expected at this conference include but are not limited to materials, design, simulation, fabrication, assembly, packaging, experimental verification and analysis of micro- and nanocomponents.

IEEE 40th International Conference on Micro Electro Mechanical Systems (MEMS) is technically sponsored by IEEE. The conference proceedings are likely to be indexed in databases such as Scopus, Web of Science (WoS), Google Scholar, and others.