The International Conference on Optical MEMS and Nanophotonics is an annual conference that addresses research topics related to optics and photonics at the micro- and nanoscale. Related applications comprise technology areas such as imaging, communication, sensing, and instrumentation, and encompasses sciences such as biology and medicine, chemistry, and fundamental physics. The conference offers researchers the opportunity to report on their latest findings in the field of optical MEMS and Nanophotonics and to promote scientific exchange between researchers and engineers from industry and academia.